Investigation of the nonlinear vibration and linearization error in resonant pressure micro sensors

Author

Department of Mechanical Engineering, Faculty of Engineering, Ardakan University.

Abstract

In the present paper, a dynamic model is presented to investigate the nonlinear vibration of resonant pressure micro sensors. The device is considered as a circular micro plate under electrostatic actuation. Due to external pressure, the micro plate deflects and moves in the electric field. This motion changes the natural frequency of the micro plate and this frequency change is used to estimate the external pressure. To model the micro sensor, the equation governing the axisymmetric deflection of the micro plate is derived in polar coordinate system. This equation is reduced to a nonlinear ODE and solved utilizing Lindstedt-Poincaré method. The nonlinear natural frequency of the micro sensor is calculated and effects of applied voltage and pressure on this frequency are studied. Findings of this work reveal that estimating the external pressure based on the linear natural frequency may results in a considerable measurement error which increases as the amplitude of plate vibration increases.

Keywords

References

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Journal of Solid and Fluid Mechanics
Volume 10, Issue 4
December 2021
Pages 263-274

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